Phase defect characterization on an extreme-ultraviolet blank mask using microcoherent extreme-ultraviolet scatterometry microscope: Journal of Vacuum Science & Technology B: Vol 31, No 6
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Residual-type mask defect printability for extreme ultraviolet lithography: Journal of Vacuum Science & Technology B: Vol 30, No 6
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Know Your Stuff: Understanding defect liability period and latent defects | The Edge Markets
Defect-free mask blanks next EUV challenge - Semiconductor Digest
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Multi-task Defect Prediction | Chao Ni
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Structure and typical defects in an EUV mask | Download Scientific Diagram
EUV multilayer defect characterization via cycle-consistent learning
key parameters contributing to printability of EUV mask defects | Download Scientific Diagram
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Analysis of phase defect effect on contact hole pattern using a programmed phase defect in EUVL mask
Types of defects on an EUV blank | Download Scientific Diagram
US20070273626A1 - System for pixel defect masking and control thereof - Google Patents
Fault masking is a dangerous condition that can be prevented
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Influence of mask line width roughness on programmed pattern defect printability
A Study on the Electrostatic Discharge (ESD) Defect in SOH Mask Pattern Cleaning | Scientific.Net
Strategy of defect mitigation for EUV masks | Download Scientific Diagram
Types of defects on an EUV blank | Download Scientific Diagram
